http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20130015518-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d3abf22e8d4fb428c0eea95ae49ab47d |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67207 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01T1-2006 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-22 |
| filingDate | 2011-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e435e841d260ec4813c1405782b4542 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9db0de901242146104ae8a86d91ad6bc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e0255ecbd815242837cd92699d53372c |
| publicationDate | 2013-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20130015518-A |
| titleOfInvention | Stage development method for scintillator surface thin film coating in vacuum deposition equipment. |
| abstract | The present invention relates to a method for developing a stage for coating a scintillator surface thin film in a vacuum deposition apparatus. More specifically, in modern medicine and science, the use of a processed inorganic scintillator that resists radiation causes higher radiation energy detection efficiency. In addition, energy resolution, accurate and fast radiographic image acquisition is required, and thus high integration and miniaturization of the radiation detection module and mass production technology are needed. To this end, the present invention relates to a stage development method for coating a metal and metal oxide thin film on the surface by inserting a unit scintillator in the vacuum deposition equipment, which reduces the process time, easy to mass production of various types, and discards all the occurrence of defective pixels It is characterized by the fact that it can be prevented. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101493718-B1 |
| priorityDate | 2011-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419514599 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID83563 |
Total number of triples: 20.