| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-122
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L33-062
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0271 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L33-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2011-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a3811d3b7ff94e8a62cc77825a3b15a7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_807bb0a822707afb0356ed5faeeef10b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1573f9f8e810d85fbd182b51a2bc5cef |
| publicationDate |
2013-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20130008576-A |
| titleOfInvention |
Radiation-sensitive resin composition |
| abstract |
The present invention provides a polymer having structural unit (I) represented by the following formula (a1), structural unit (II) represented by the following formula (a2), and structural unit (III) comprising a lactone structure, and (B) A radiation sensitive resin composition containing a radiation sensitive acid generator and whose content rate of the said structural unit (I) is 50 mol% or more with respect to all the structural units which comprise a polymer [A]. It is preferable that the polymer (A) further has a structural unit (III) having a lactone structure. It is preferable that the said structural unit (I) is a structural unit (I-1) represented by following General formula (a1-1). |
| priorityDate |
2010-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |