http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20130000219-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C12Q1-6825 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C12Q1-6869 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-44791 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-48721 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C12Q1-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-02 |
| filingDate | 2011-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_224ad91782b7d0fb914016761ce6828e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f5fd24f950fc31ff12c755a9c5b1844c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_33b34037e67469fe04557d82cc6b9b75 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_93191c244353d8d4d4794555c248be2a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_41b3138c42f999815768b5dfb8cd1cee |
| publicationDate | 2013-01-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20130000219-A |
| titleOfInvention | Nano sensor and its manufacturing method |
| abstract | The disclosed nano sensor is provided on a substrate having a hole, a first insulating layer having a nanopore, and first and second electrodes spaced apart from each other on the first insulating layer, respectively, on the first and second electrodes. It may include the first and second electrode pads and the protective layer provided on the first and second electrode pads. The disclosed method for manufacturing a nano-sensor includes forming a first insulating layer, graphene, a metal layer on a substrate, patterning a metal layer and graphene, forming a protective layer on a portion of the metal layer and graphene, Removing a portion, exposing a portion of the graphene and forming a hole in the substrate, and forming a nanopore connected to the hole in the first insulating layer and graphene. |
| priorityDate | 2011-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 31.