http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20120140536-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3164a963ca21cec1151213cb1bb95e77
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
filingDate 2011-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_35ddc2e7214db2127addd7501b45d2f3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_05b380148ace2902642db9eb356ca873
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a073824202d68f46f7863c89a7a70dc8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_88525d7e91cc9b7df89fbe3375942a9c
publicationDate 2012-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20120140536-A
titleOfInvention Positive polymer resist containing photoacid generator and its manufacturing method
abstract The present invention relates to a positive type polymer photoresist and a method for manufacturing the same, which can be used as AFM, KrF, ArF or electron beam resist photoresist, can realize high resolution ultra fine line width, and can be used with tetramethylammonium hydroxide (TMAH). The developing power is excellent in the same commercial developer.
priorityDate 2011-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11729320
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8028
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13679
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID60966
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID57676266
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421172613
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456171974
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24503
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453615033
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577639
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414874041
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448674543
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559283
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524045
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458392451
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6547

Total number of triples: 34.