http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20120129166-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-127 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-4146 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7869 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-54373 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-4145 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N33-483 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-414 |
| filingDate | 2011-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2012-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20120129166-A |
| titleOfInvention | Thin Film Transistor Based Biosensor Manufacturing Method |
| abstract | According to the present invention there is provided a method of manufacturing a thin film transistor (TFT) based biosensor for sensing a desired biomaterial, the method comprising forming a gate electrode on a substrate; Forming a gate insulating film on the gate electrode; Forming a chalcogenide channel layer on the gate insulating film; Forming a passivation layer on the chalcogenide channel layer by atomic layer deposition; Using a photoresist, forming a source / drain region and removing the passivation layer on the source / drain region; And forming a source / drain electrode, wherein the passivation layer is formed of a high dielectric material that protects the chalcogenide channel layer from an external environment and improves the sensitivity of sensing the biomaterials of the channel layer. It features. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101491257-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9709525-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11099152-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200083714-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200094087-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9080969-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020159133-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10473616-B2 |
| priorityDate | 2011-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.