http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20120128680-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0271 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2011-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2012-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20120128680-A |
| titleOfInvention | Method for forming radiation-sensitive resin composition and resist pattern |
| abstract | This invention is a radiation sensitive resin composition containing the acid generator which generate | occur | produces an organic acid by irradiation of [A] radiation, and this organic acid contains the bond which cut | disconnects with a cyclic hydrocarbon group and an acid or a base, and produces a polar group. It is a radiation sensitive resin composition characterized by having an organic group. The organic acid is preferably an organic acid represented by the following general formula (I). (In formula (I), Z is an organic acid group, R 1 is an alkanediyl group, provided that some or all of the hydrogen atoms of the alkanediyl group may be substituted with fluorine atoms, X is a single bond, O, OCO, COO, CO, SO 3 or SO 2 , R 2 is a cyclic hydrocarbon group, R 3 is a monovalent organic group having the functional group represented by the formula (x), n is an integer of 1 to 3, provided that R 3 Plural R 3 's may be the same or different). |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101867410-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10216084-B2 |
| priorityDate | 2010-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 244.