http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20120127889-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0042 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D309-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D211-74 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0271 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D211-74 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D309-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2011-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2012-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20120127889-A |
| titleOfInvention | Novel sulfonate, photoacid generator and photoresist composition comprising the same |
| abstract | Novel sulfonates used in chemically amplified resist materials and the like, photoacid generators produced therefrom, photoresist compositions comprising the same, and pattern forming methods using the same are disclosed. The sulfonate is represented by the following formula (1). [Formula 1] In Formula 1, R 1 and R 2 are each independently a hydrogen atom (H), a hydroxy group, an alkoxy group having 1 to 20 carbon atoms, a carboxyl group, or a substituted or unsubstituted linear, branched or cyclic hydrocarbon having 1 to 20 carbon atoms. X 1 and X 2 are each independently a fluorine atom (F), a hydroxyl group, or a substituted or unsubstituted linear, branched or cyclic hydrocarbon group having 1 to 20 carbon atoms, and Y is an oxygen atom (O) or an amino group (-NH-), n is an integer from 1 to 10, and M + represents a cation. |
| priorityDate | 2011-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 88.