http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20120123129-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G2101-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G2110-0025 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G18-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G18-4854 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G18-4277 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G18-2835 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G18-797 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G101-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G18-30 |
| filingDate | 2011-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2012-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20120123129-A |
| titleOfInvention | Polishing pad, method of manufacturing the same, and method of manufacturing a semiconductor device |
| abstract | An object of the present invention is to provide a polishing pad capable of reducing a minute undulation occurring on the surface of an object to be polished, a method of manufacturing the same, and a method of manufacturing a semiconductor device. In order to achieve the above object, there is provided a polishing pad having an abrasive layer comprising a thermosetting polyurethane foam, wherein a thermosetting polyurethane foam containing an isocyanate component and an active hydrogen-containing compound as a raw material component is used, A polyol compound having a number of 2 or more and a monool compound having a functional group number of 1 is used. |
| priorityDate | 2010-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 95.