http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20120122911-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate | 2012-04-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2012-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20120122911-A |
| titleOfInvention | Polishing composition, polishing method and manufacturing method using same |
| abstract | The present invention provides polishing compositions having high removal rates for noble metal oxides and uses thereof. The polishing composition of the present invention contains a ligand compound and water. As the ligand compound, one having a capability of capturing a noble metal from a noble metal oxide to form a metal complex, and the capability is higher than that of capturing a noble metal from the same kind of precious metal as the noble metal among the noble metal oxides to form a metal complex. Examples of the ligand compound include, for example, thiocyanate salts such as ammonium thiocyanate, thiosulfate salts such as ammonium thiosulfate, adithiate salts such as sodium adithionate, tetrathiate salts such as sodium tetrathiate dihydrate, and the like. Diethyldithiocarbamate such as diethylammonium ethyldithiocarbamate, dimethyldithiocarbamate such as sodium dimethyldithiocarbamate dihydrate, and dimethylammonium dimethyldithiocarbamate, and thiourea . |
| priorityDate | 2011-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 123.