| abstract |
The method of manufacturing the inertial sensor of the present invention, the method of manufacturing the inertial sensor 100 according to the present invention (A) the first mold 120 and the first side on both sides of the predetermined region (R) of the membrane-like membrane 110 2 placing the mold 125, (B) forming the mass 130, the post 140 and the upper cap 150 through the plating or filling process, (C) the first mold 120 and Disposing the third mold 160 on the exposed surface of the mass body 130 and (D) forming the lower cap 170 through a plating process or a filling process, and performing a plating process or a filling process. Since the mass 130 is formed of metal, the density of the mass 130 can be increased and the mass 130 can be formed in a high aspect ratio structure, thereby improving the sensitivity of the inertial sensor 100. |