| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-5004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67051
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67034
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate |
2012-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92351f26b369693a4c89b297950528ca
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c2d03bea383c9cdd79b7ea0451dcbe6e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_40f1b885ac1e2104415d691f87f7e816 |
| publicationDate |
2012-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20120117678-A |
| titleOfInvention |
Liquid treatment method, liquid treatment device and storage medium |
| abstract |
An object of the present invention is to rapidly infiltrate a chemical liquid into the recess in treating the inside of the recess formed on the surface of the substrate with the chemical liquid. The liquid treatment method includes a prewetting step of supplying an organic solvent having a surface tension smaller than that of a chemical solution to a substrate to wet the interior of the recess, and then supplying a cleaning solution containing the chemical solution to the substrate, thereby supplying the liquid inside the recess. The chemical liquid cleaning process of washing | cleaning the inside of the said recessed part with this chemical liquid is included. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101877183-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102029127-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104624548-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10079142-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11488834-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160008719-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020162667-A1 |
| priorityDate |
2011-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |