| abstract |
As a ZnO evaporation material used for film formation, such as a transparent conductive film, 1 or 2 or more types of 1st addition elements chosen from Ce, La, Y, Pr, Nd, Pm, Sm, and Al, Ga, Sc, B It contains the 1 type (s) or 2 or more types of 2nd additional element selected, content of a 1st additional element is more than content of a 2nd additional element, and content of 1st additional element is 0.1? 14.9 mass%, content of 2nd additional element is 0.1? A ZnO porous sintered compact in the range of 10 mass% is mainly used. The sintered body is 3? It has a porosity of 50%. |