| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5128cfc84a0fb189fceb3cd240c44493 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-322
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0041 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32 |
| filingDate |
2011-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_268d8bf12fbb1399e594b33aeb970d9b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_13d32c4da28dcacbf46aab593887ffb6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2904ec7d07a77500825a81ff27c21e2e |
| publicationDate |
2012-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20120104339-A |
| titleOfInvention |
Copper oxide etching solution and etching method using the same |
| abstract |
An object of the present invention is to provide an etching liquid for copper oxide and an etching method using the same, which can selectively etch the exposed and unexposed portions when exposed to laser light using an oxide of copper as a thermally reactive resist material. The etching liquid for copper oxide of this invention is an etching liquid for copper oxide for selectively etching copper oxide from which copper oxide differs in the copper oxide containing layer which has a copper oxide as a main component, It contains a chelating agent or its salt at least. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9324766-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9373821-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9502655-B2 |
| priorityDate |
2010-02-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |