Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6b822ee046eb6c45d1e3bd9ce9c1782e |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78693 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7869 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78696 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1225 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66969 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66742 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 |
filingDate |
2012-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_71d50a7293caba9c14997027f9784f5a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c35d41ad7464221b4b3a8c7f85fa8a5e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_98a50d21ceba6536a4663c7f4cff2d4e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f7704ba557cbe048a15ed797336e513a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_324fc8ab164289507a8a9391d7056b15 |
publicationDate |
2012-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-20120104111-A |
titleOfInvention |
Semiconductor device and manufacturing method thereof |
abstract |
An object of the present invention is to provide a semiconductor device in which variations in electrical characteristics due to miniaturization are less likely to occur. An oxide semiconductor film including a first region and a pair of second regions facing each other via the first region, a gate insulating film formed over the oxide semiconductor film, and a second film formed over the gate insulating film and overlapping the first region The first region is a non-single-crystal oxide semiconductor region having a first electrode and having a c-axis aligned crystal portion, and the pair of second regions are oxide semiconductor regions containing a dopant and having a plurality of crystal portions. It is a semiconductor device. |
priorityDate |
2011-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |