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publicationDate 2012-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20120103415-A
titleOfInvention Plasma Generating Device and Plasma Generating Method
abstract At the same time, it increases the amount of active species and prevents condensation or moisture adhesion on the dielectric film. A pair of electrodes in which a dielectric film is provided on at least one of the opposing surfaces, and a plasma is discharged by applying a predetermined voltage between the electrodes, and a coating film is provided on the surface of the dielectric film.
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