| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_070875329d2add3d65875c6c1b27108a |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-6486
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-6428
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-645
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0665 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N33-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N35-00 |
| filingDate |
2011-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eaa4ba9061e76df329c39f5361b45a1e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5595d1d0be9ad34167d65c0b3a1985d3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_48c636e155e000f7259c595833a21886
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0304dee995587bb963f6430adb8f53bf |
| publicationDate |
2012-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20120099835-A |
| titleOfInvention |
Silicon Nanowire Biosensor Module |
| abstract |
The present invention discloses a silicon nanowire biosensor module. The present invention provides a first silicon substrate on which silicon nanowires are formed, a second silicon substrate bonded to the first silicon substrate, and a microfluidic channel is formed to expose the silicon nanowires to the outside. 2 is disposed so as to be inserted into the silicon substrate, and a part includes a light guide part disposed to protrude out of the second silicon substrate, and a light source part spaced a predetermined distance from one end of the light guide part. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021153831-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101475732-B1 |
| priorityDate |
2011-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |