| abstract |
The polysilane-polysilazane copolymer contains polysilane units of formula (I), and polysilazane units of formula (II). Polysilane-polysilazane copolymers may be formulated in the composition with a solvent. Polysilane-polysilazane copolymers may be used for trench filling in PMD and STI applications, where the trench has a width of 100 nm or less, and an aspect ratio of 6 or more. Polysilane-polysilazane copolymers may be prepared by amination of a perchloro polysilane having two or more silicon atoms per molecule with a primary amine. Wherein R 1 and R 2 are each independently selected from H, Si, and N atoms, R 3 is selected from H, Si, or C atoms, a ≥ 1, b ≥ 1, and (a + b ) ≥ 2. |