http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20120090990-A

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filingDate 2009-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a044d9240f24358d7cf55f742fd71f7
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publicationDate 2012-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20120090990-A
titleOfInvention Purification Method of Chlorosilane
abstract A method for purifying crude chlorosilane containing a boron compound, comprising the step of bringing a chlorosilane containing a boron compound into contact with an ion exchange resin and a step of contacting with a silica-based adsorbent, wherein the purification of chlorosilane is carried out. The method is disclosed. It is preferable to bring the crude chlorosilane into contact with the ion exchange resin and then to the silica-based adsorbent. The silica-based adsorbent is preferably silica gel, and the ion exchange resin is represented by the general formula: -CH 2 NR 1 R 2 (wherein R 1 And the like as defined in the specification).
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