http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20120072377-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fd446fb0d73aa96d044fea2eaa3c8ebc |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24975 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-086 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-50 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-02167 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-022466 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-048 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-02165 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1884 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-086 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-022483 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-042 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-0216 |
| filingDate | 2010-09-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db838b8ef6725be01714bc2e6770c7c1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e5c9d8f56cebc484e3fa9a641238ef3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_567b47a5724e96d2dfd617d03c94d054 |
| publicationDate | 2012-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20120072377-A |
| titleOfInvention | A substrate manufacturing method having a colored interference filter layer, the substrate comprising a colored interference filter layer, and an array including two or more substrates |
| abstract | The present invention relates to a method for producing a substrate having a colored interference filter layer comprising polycrystalline metal oxide (s) using a coating apparatus, in particular through physical or chemical vapor deposition using a sputtering gas, wherein the method Two or more, in particular six or more, coating layers are deposited up and down from the gas phase under formation, and the average thickness of each coating layer lies in the range of about 50 nm to 350 nm, in particular in the range of about 90 nm to 210 nm, each of two or more, in particular The percentage-based average atomic content of one or more metals, in particular all individual metals, contained in all coating layers is less than or equal to +/- 20 atomic percent, preferably less than or equal to +/- 10 atomic percent, from the average compositional ratio of the respective metals in the interference filter layer, Particular preference is given to differences of up to +/- 5 atomic%, with 100 atomic% representing the sum of all metals contained in the layer. In addition, the present invention relates to a colored substrate obtainable by this method and an array comprising such a plurality of substrates. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190100132-A |
| priorityDate | 2009-09-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 62.