http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20120068793-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_00b31a48a75b1c34ab4cae2e7bf69c82 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate | 2012-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db8cc8b75c03beaf4bb46b85a2e79c51 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b96fa6cee4779bdf2debb7d28d47ef68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3512c457aed3103932bac889cb93a4b8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_24f6b254c0221e271365c9bcc8bb72ec http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f2d5699a5a312410a2685b3e55d12cca |
| publicationDate | 2012-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20120068793-A |
| titleOfInvention | Air Conditioning System for Semiconductor Process |
| abstract | The present invention provides an inlet duct 11 through which circulating air is introduced during external air or a semiconductor process; A connection duct 13 through which air from which contaminants have been removed is supplied to a semiconductor process; Cooling unit 31, the heater 33, the humidifier 35 is composed of a control unit 30 for controlling the temperature and humidity of the outside air or circulating air; A filter unit 20 consisting of a pre-filter 21 and a chemical filter 25 to remove contaminants on dust and ionic molecules contained in outside air or circulating air; In the semiconductor air conditioner system (1) having a blowing fan (60) for forcibly circulating air, at least one anion exchange resin layer (27-1) in front of or behind the chemical filter (25) of the filter unit (20). The present invention relates to an air conditioner system (1) for semiconductors, further comprising a NOx filter (27) for removing nitrogen oxides. |
| priorityDate | 2012-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.