Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b051f9f7933c758e66f6ceda5c9fb2cc |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-547 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1804 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-02363 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D1-86 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D1-86 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-04 |
filingDate |
2011-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a91a712f05772e0c82260323c5a7b5c0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4865151946cb04fd7ebc9519f67429f7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_815eecbd95c27371f74fa181d4076e5d |
publicationDate |
2012-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-20120059378-A |
titleOfInvention |
Compositions and Methods for Texturing Silicon Wafers |
abstract |
The present invention relates to a pre-texturing composition for texturing a silicon wafer with one or more surfactants. The invention also relates to a method of texturing a silicon wafer with a texturing step, followed by the step of wetting the silicon wafer with a pre-texturing composition with one or more surfactants. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102400266-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102400265-B1 |
priorityDate |
2010-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |