| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D18-0054
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D11-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D18-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2011-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9de007165de5df3dd07bb7b217462de1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_61f7071f2e7f93579eb505d9ae00b2ba
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d78542325e7add3735a0cde3099e441b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_77b73ba2814ac6f2ec8730576f302e74
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6371cb030ffd84d94f5c079529cbbfb8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ffc7b5aed79a48579ee19835d720224b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_64702511ff75b3fdf509b4b9e76bd88e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_24c5f51c97c8ae182d807e1ffb10b189
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3b917ef523649f9f062a2689bd636e1f |
| publicationDate |
2012-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20120057517-A |
| titleOfInvention |
Silicate composite polishing pad |
| abstract |
The present invention provides a polishing pad useful for polishing at least one of a semiconductor substrate, a magnetic substrate, and an optical substrate. The polishing pad includes a polymer matrix having a polishing surface. Polymer microelements are distributed in the polymer matrix and on the polishing surface of the polymer matrix. The silicate containing regions distributed within each polymer microelement cover less than 50% of the outer surface of the polymer microelement. Less than 0.1% by weight of the total polymer microelements i) silicate particles having a particle size greater than 5 μm; ii) silicate containing regions covering more than 50% of the outer surface of the polymeric microelement; And iii) polymer microelements agglomerated with silicate particles with an average cluster size of greater than 120 μm. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180121840-A |
| priorityDate |
2010-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |