http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20120030961-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L33-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F26-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F20-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F20-10 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L33-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate | 2011-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3da7cce5f8198286bad6706fba87bc7b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d5783c924eb99533d01f0b89dc260e78 |
| publicationDate | 2012-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20120030961-A |
| titleOfInvention | Resin, resist composition, and method for producing resist pattern |
| abstract | The present invention provides a resin having a structural unit derived from a compound represented by the formula (I). [Wherein, R 1 represents a C 1 to C 6 alkyl group, hydrogen atom or halogen atom which may have a halogen atom; A 1 represents a C 1 to C 6 alkanediyl group which may be substituted or a group represented by the following formula (a-1); Ring X 1 represents a C 2 to C 36 heterocyclic ring, wherein the hydrogen atom contained in the heterocyclic ring is a halogen atom, a hydroxy group, a C 1 to C 24 hydrocarbon group, a C 1 to C 12 alkoxy group, a C 2 to C 4 O that group or may be substituted with an acyloxy group of C 2 to C 4 (Wherein s represents an integer of 0 to 2; A 10 and A 11 each independently represent a C 1 to C 5 aliphatic hydrocarbon group which may be independently substituted; A 12 may be substituted to C 1 to C) An aliphatic hydrocarbon group or a single bond of C 5 ; X 10 and X 11 each independently represent an oxygen atom, a carbonyl group, a carbonyloxy group or an oxycarbonyl group; provided that A 10 , A 11 , A 12 , Total carbon number of X 10 and X 11 is 12 or less)] |
| priorityDate | 2010-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 322.