| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8d4914041481b14c69ec0c4b48e9e372 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2101-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-50 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-0648
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-0665
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-082
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-032 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-073 |
| filingDate |
2010-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d9023015944618cdd5b8f9952ceb1c0 |
| publicationDate |
2012-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20120027393-A |
| titleOfInvention |
Laser processing system using target feature and through lens alignment of laser beam |
| abstract |
A laser processing system for micromachining a workpiece provides a laser source for generating laser pulses for processing a feature of the workpiece and a first relative movement of the laser beam spot position along the processing trajectory with respect to the surface of the workpiece. Galvanometer-driven (Galbo) subsystem and an acoustic-optical deflector (AOD) subsystem. The AOD subsystem may include a combination of AODs and electro-optical deflectors. The AOD subsystem can change the intensity profile of the laser pulses as a function of the deflection position along the dither direction. An AOD subsystem can be used to align the processing laser beam to the workpiece features. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150104563-A |
| priorityDate |
2009-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |