| abstract |
A lithographic method using a tip array having a plurality of pens attached to a support layer is disclosed. The tips may comprise metal, metalloid, and / or semiconducting material and the support layer may comprise an elastomeric polymer. The tip array is used to perform lithography where the tips are coated with ink (eg, patterning composition) that accumulates on the substrate upon contact of the tip with the substrate surface. The tips can be easily leveled to the substrate, and the leveling can be visually monitored near the tips upon change in light reflection of the support layer and / or upon contact of the tip and the substrate surface. |