| abstract |
The present invention relates to a solid state laser (1), beam shaping lens (3), oscillating mirror motors (5,7), oscillating mirrors (4,6), field of view lens (9), moving stage (10), industrial computers and The control software 8 includes a beam shaping lens below the solid state laser, and shapes the laser beam emitted from the solid state laser 1 into a predetermined beam shape, and the oscillating mirror motors 5 and 7 have a field of view lens ( And a solid state laser device which forms a floating beam scan path by controlling the operation of the oscillating mirrors 4 and 6 in accordance with a command issued from the control software 8 in front of 9). In addition, the peeling method using the solid state laser device separates GaN from the sapphire substrate without damage by scanning by using a small laser light spot. |