| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aafe0172ffd94d3486c518b0709bb2b3 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0271
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2010-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0413dbcdc1e4cde12e814fca1e7efe3e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_685bbe5a9510f83733ff7aabf6615392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4b8afafd0f943e93866e15f5f8d7f889
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4445ca5d86e19df7d61dce3199573d81
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6bc3ad76237cc5138bfe08758f27fea9 |
| publicationDate |
2012-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20120004192-A |
| titleOfInvention |
Aromatic ring-containing compound for resist underlayer film, resist underlayer film composition comprising same and pattern forming method of device using same |
| abstract |
The aromatic ring containing compound for resist underlayer films, the resist underlayer film composition containing this compound, and the pattern formation method of an element are provided. The aromatic ring-containing compound includes a repeating unit represented by the following Formula 1-1 and a repeating unit represented by the following Formula 1-2. [Formula 1-1] [Formula 1-2] In Chemical Formulas 1-1 and 1-2, the definition of each substituent is as defined in the detailed description. |
| priorityDate |
2010-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |