http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20120001766-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47cc435e1d443f13180f7766df104d9d
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-00
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
filingDate 2010-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_70e69a788219412d5d24de635f0d6131
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92f938c9371b233ccb87526d800d2bd8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a40d349f03617619ed73ebcb7fd90686
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51f8f4129cad146e27dd7321b078fbfb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db40fca061e5d0de74e48225a8b62379
publicationDate 2012-01-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20120001766-A
titleOfInvention Polishing Liquid for Semiconductor Substrate and Polishing Method of Semiconductor Substrate
abstract The present invention contains abrasive particles, 1,2,4-triazole and an alkaline compound, wherein the alkaline compound is a nitrogen-containing alkaline compound or an inorganic alkaline compound, the content of the alkaline compound is 0.1% by mass or more, and the pH is 9 or more 12. It relates to the polishing liquid for semiconductor substrates which is the following.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160013896-A
priorityDate 2009-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24261
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449266279
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15826429
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID67516
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453615033
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453327643
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453715328
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410697574
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452716272
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450414884
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420754769
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411738766
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419519962
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID60966
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9257
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82764
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8112
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454334062
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14923
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24832111
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14797
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID409060395
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID222
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14798
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID406908050
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23670858
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419517616
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419579030
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14098
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707758
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15913
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25199638
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21989496
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426260397

Total number of triples: 60.