| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8e89cc2c12f45d859e75fc319ba7d5a9 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-1105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-107
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24273
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24479
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2201-0129
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-56 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-389
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-0017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B26D7-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03K3-0231
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-354
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C23-0025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B26F1-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-1423
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03B5-1296
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03B5-1203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03B5-1228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-0006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67092
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-348 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B26D7-10 |
| filingDate |
2010-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c81a83d88f53ff198aa413819679f523
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc111abb9202b9f091c27f0a4c7201ad |
| publicationDate |
2011-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20110135947-A |
| titleOfInvention |
A method of creating a hole or recess or well in a substrate, an apparatus for performing the method, and a high frequency high voltage source for use in such apparatus |
| abstract |
The present invention relates to a method of creating a hole or recess or well in an electrically insulating or semiconducting substrate, and to a hole or recess or well in a substrate produced by such a method. The invention also relates to an array of holes or recesses or wells in a substrate produced by the method. The invention also relates to an apparatus for carrying out the method according to the invention. |
| priorityDate |
2009-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |