http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20110127851-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_799b6c8cb40ea97102dceda7bfe7b5c7 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y15-00 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82B3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-128 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-127 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-363 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82B3-00 |
| filingDate | 2010-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0af357b74c61d1cdb98371487f83c159 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1442a7fb0e02f95eda5068ff222043ae http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_07515dd839c0adb31fceaa07a50101a2 |
| publicationDate | 2011-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20110127851-A |
| titleOfInvention | High Sensitivity Gas Sense Using Fluorine Treated Carbon Material and Its Manufacturing Method |
| abstract | A high sensitivity gas sense using a fluorine-treated carbon material and a method of manufacturing the same are disclosed. Method for producing a high sensitivity gas sensor using a fluorine-treated carbon material according to the present invention, (1) the first step of placing the carbon material in the reactor, and heat treatment; (2) a second step of injecting fluorine gas into the reactor to fluorine the carbon material heat-treated through the first step; And (3) a third step of manufacturing a gas sensor by depositing the fluorine-treated carbon material between the silicon wafer electrodes through the second step. According to the present invention, it is possible to manufacture a gas sensor excellent in sensitivity and response to the target gas even at room temperature. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101305454-B1 |
| priorityDate | 2010-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 45.