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publicationDate 2011-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20110123025-A
titleOfInvention Metal wiring etchant and metal wiring formation method using the same
abstract Provide a metallization etchant. Metal wiring etching solution according to an embodiment of the present invention includes ammonium persulfate, 0.1 to 30% by weight organic acid, 0.01 to 5% by weight phosphate and azole compound.
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