http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20110118803-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_32ce12f8709350afe097badddf523729 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-092 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 |
| filingDate | 2010-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6a928ef4864f78c9939daac3f57b8b75 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_22f7f61ea5400bcf982c4ebf0e7119be http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_028ac0667b7e60c457168d9bb8db73f0 |
| publicationDate | 2011-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20110118803-A |
| titleOfInvention | Photosensitive resin laminate |
| abstract | An object of the present invention is to provide a photosensitive resin laminate having high sensitivity and low sensitivity drop (ie, sensitivity change) due to hold time, that is, having good storage stability. Moreover, an object of this invention is to provide the formation method of the resist pattern including forming the photosensitive resin layer on a board | substrate using this photosensitive resin laminated body, and exposing and developing the photosensitive resin layer. This invention is a laminated body which contains a support film, the photosensitive resin layer which consists of a photosensitive resin composition, and a protective film at least, The protective film has following general formula (I): (In formula, R < 1> and R < 2> represents a hydrogen or a C1-C6 alkyl group each independently.) The antioxidant containing the structure shown, The phenol equivalent of this antioxidant is 3.1 * 10 < -3> or less And the photosensitive resin laminated body whose content of the antioxidant in this protective film is more than 1 ppm and 3000 ppm or less. |
| priorityDate | 2009-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 198.