| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a665d61597c2731ab4130971ee397dc9 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02074
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24C1-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G73-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2011-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8f3fbd6824067e90f9286f54a9d7a4a0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f07ea293e839a9b383f4cec85d6582d3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7ac4a6179aefdc933f6088105a66f464 |
| publicationDate |
2011-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20110113131-A |
| titleOfInvention |
Polishing Compositions and Polishing Methods |
| abstract |
The present invention provides a polishing composition which can be preferably used in polishing for forming wirings of a semiconductor device and a polishing method using the same. The polishing composition of the present invention contains a polishing accelerator, a water-soluble polymer containing a structural unit derived from a polymerizable compound having a guanidine structure such as dicyandiamide, and an oxidizing agent. The water-soluble polymer may include a structural unit derived from dicyandiamide and a structural unit derived from formaldehyde, diamine or polyamine. |
| priorityDate |
2010-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |