http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20110112429-A

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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
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filingDate 2010-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fc51c09347a141a175979c328057fbfa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e013a9eed35833d1cd1accc769d86fc8
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publicationDate 2011-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20110112429-A
titleOfInvention Copper Polishing Abrasives And Polishing Method Using The Same
abstract The present invention includes (A) a divalent or higher inorganic acid, (B) amino acid, (C) protective film former, (D) abrasive grain, (E) oxidizing agent, and (F) water, (A) component The content of is 0.08 mol / kg or more, the content of the component (B) is 0.20 mol / kg or more, the content of the component (C) is 0.02 mol / kg or more, and at least one of the following (i) and (ii) Provided are abrasive polishing abrasives. (i) The ratio of content of the said (A) component with respect to content of (C) component is 2.00 or more. (ii) (G) further contains at least one selected from organic acids and acid anhydrides thereof.
priorityDate 2009-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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