http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20110110010-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_44ff3005508304394801e265e503b811 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0337 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-58 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate | 2011-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7bf1f69ddc77d59d92eed5213ac499df |
| publicationDate | 2011-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20110110010-A |
| titleOfInvention | Multi-gradation photomask, manufacturing method of multi-gradation photomask, blank and pattern transfer method for multi-gradation photomask |
| abstract | The light shielding portion is formed by laminating a translucent film, a phase shift adjusting film, and a light shielding film on a transparent substrate. The semi-transmissive portion is formed by laminating a translucent film and a phase shift adjusting film on a transparent substrate. The transparent part exposes a transparent substrate. The material and thickness of the transflective film and a phase shift adjustment film are set so that the phase shift amount at the time of transmission of the semi-transmissive part of the light of the typical wavelength within the range of i-g line will be 60 degrees or less with respect to the said transmissive part. . |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140099427-A |
| priorityDate | 2010-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.