http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20110093995-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-3765 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-3776 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-3773 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-5004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-222 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-37 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-43 |
| filingDate | 2009-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b524eb13fa5665badfa82ea000fd1bb6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_df84a452448a8906e5bcf5dda4233f77 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_887cf6d06972fc0c844acf1257547e30 |
| publicationDate | 2011-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20110093995-A |
| titleOfInvention | Composition of Cleaning Materials for Particle Removal |
| abstract | Embodiments of the present invention provide an improved material for cleaning substrates for patterning with fine features. This cleaning material is beneficial in cleaning patterned substrates with fine features without substantially damaging the features. The cleaning material is a fluid that is either liquid or liquid / gas dual phase, and deforms around the device feature; Thus, the cleaning material does not damage or together damage the device features. To aid in the removal of particles from the wafer (or substrate) surface, the polymer compound of the polymer may include polar functionalities that can establish hydrogen bonding and polar-polar molecular interactions with the hydrolyzed particles on the wafer surface. Polymers of high molecular weight polymer compound (s) form long polymer chains and nets. Long polymer chains and / or polymer nets show superior ability to trap and entrap contaminants as compared to conventional cleaning materials. The polymer compound (s) of the polymer may also include functional groups that carry charge in the cleaning solution. The charge of the functional groups of the polymer improves the particle removal efficiency. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10711228-B2 |
| priorityDate | 2008-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 70.