http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20110091722-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32412 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2236 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-265 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265 |
| filingDate | 2009-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_47180b4860ed94c46cf38d266e350ffe http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_91661929562935f195ea14341d57d636 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b19712fb51245c859d011f0d5fd23bb3 |
| publicationDate | 2011-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20110091722-A |
| titleOfInvention | Improvement of conformal doping in P3I chamber |
| abstract | Methods for implanting ions into a substrate by a plasma implanted ion implantation process are provided. In one embodiment, a method for implanting ions into a substrate comprises providing a substrate in a processing chamber, the substrate comprising a substrate surface having one or more features formed therein, each feature having one or more horizontal surfaces and one Having more than one vertical surface; Generating a plasma from a gas mixture comprising a reactant gas configured to generate ions; Depositing a layer of material on the substrate surface and on at least one horizontal surface of the substrate feature; Implanting ions from the plasma into the substrate and into at least one horizontal surface and into at least one vertical surface by an isotropic process; And etching the material layer on the substrate surface and the at least one horizontal surface by an anisotropic process. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013163082-A1 |
| priorityDate | 2008-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.