http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20110089348-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-5445
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2204-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6719
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-064
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-445
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-708
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3206
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3201
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-6567
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-343
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-6562
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-6565
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-08
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-81
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C10-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-119
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B37-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C3-247
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C8-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-45
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C3-325
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-85
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B41-85
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B41-81
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B41-45
filingDate 2009-11-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e9ec0b055d14dd615324a182a5944f21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_71a8a5872c1bd3b14deae5d6211e4202
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9da225554df0144657bbe981e528c192
publicationDate 2011-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20110089348-A
titleOfInvention Corrosion resistant binders for bonding ceramic components exposed to the plasma
abstract Embodiments of the present invention relate to component structures useful as devices in a plasma processing chamber. Some of the component structures are bonded to each other using oxyfluoride containing glazes, glass ceramics, and combinations thereof. The binding material is corrosion resistant to halogen containing plasma and exhibits the desired mechanical properties.
priorityDate 2008-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14917
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID157577571
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID161465672
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559561
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449789534
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559562
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16217673
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453564528
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID83679
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID28179
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520551
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448145039

Total number of triples: 57.