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publicationDate 2011-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20110085152-A
titleOfInvention Method for manufacturing ruthenium dioxide thin film using electron beam irradiation and ruthenium dioxide thin film with improved energy storage capacity
abstract The present invention relates to a method for preparing a ruthenium dioxide thin film using electron beam irradiation, and to an improved ruthenium dioxide thin film with improved energy storage capability. Step (step 1); Immersing the substrate in the electrolyte solution prepared in step 1, and preparing a ruthenium dioxide thin film by an electrochemical deposition method (step 2); And it relates to a method for producing a ruthenium dioxide thin film comprising a step (step 3) of irradiating an electron beam on the thin film prepared in step 2 and the ruthenium dioxide thin film with improved energy storage capacity produced thereby. The ruthenium dioxide thin film according to the present invention is manufactured by performing only electron beam irradiation instead of the high temperature firing process, which is essentially required in the conventional method, to simplify the process, and to improve the stability and electrode activity of the electrode, thereby improving thin film crystallinity and energy. The storage capacity and electrical performance are greatly improved, and can be usefully used for electrode materials such as catalysts, lithium secondary batteries, ultracapacitors and the like.
priorityDate 2010-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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