| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aafe0172ffd94d3486c518b0709bb2b3 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31663 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L83-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L83-04 |
| filingDate |
2008-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_34a1b44bbadcde8964b69330ed82885d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_abe80a6cb4fff11f8fc4ffc2b49e771a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2a339e9efe93656180c3c40f9cf084de
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1df97b084d3900799e0f650942810d49
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_93840cf2ba8e81ec0fef8988bbd2c868 |
| publicationDate |
2011-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20110079609-A |
| titleOfInvention |
Compound for fine gap fill of semiconductor device, composition comprising same and method for manufacturing semiconductor capacitor |
| abstract |
Disclosed are a compound that can be used in a node separation process for manufacturing a semiconductor capacitor and a composition for a semiconductor fine gapfill including the same. The composition for the semiconductor microgap fill does not significantly change in molecular weight depending on the number of storage days, and melts at a desired dissolution rate (DR) in a developer having an alkali, and at the same time, the development speed does not change significantly depending on the storage days. Excellent stability |
| priorityDate |
2008-09-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |