| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aafe0172ffd94d3486c518b0709bb2b3 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1454
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate |
2009-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c5a99a7c144933a7bf770350b2e6bb62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1454918d2fdd49189591db1afdc9d544
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_669bf2bcf14eb52fb817da499ea242c7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_941acc194004055ee720bae351724f5c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a9801226396a7d3f4e927e16ad6250c8 |
| publicationDate |
2011-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20110079160-A |
| titleOfInvention |
CPM slurry composition and polishing method using the same |
| abstract |
The present invention relates to a CMP slurry composition, wherein the composition of the present invention comprises a benzene ring compound substituted with two or more hydrophilic substituents; Cerium oxide particles; And adsorption regulators. Such a composition of the present invention can improve the patterned oxide polishing efficiency and the life of the diamond disk conditioner. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016094028-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018504770-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3230395-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170097090-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108473850-A |
| priorityDate |
2009-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |