| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aafe0172ffd94d3486c518b0709bb2b3 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-387 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0752
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-387
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F230-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-18 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate |
2009-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0f496c307a54555e97bc528a84e29eab
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c5d42751fa79325440240f984f272f1d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_93840cf2ba8e81ec0fef8988bbd2c868
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2a339e9efe93656180c3c40f9cf084de |
| publicationDate |
2011-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20110058128-A |
| titleOfInvention |
Polymer for resist protective film and resist protective film composition comprising same |
| abstract |
It relates to a polymer for a resist protective film, a resist protective film composition and a pattern forming method comprising the same, the polymer is a first repeating unit represented by the formula (1); And a second repeating unit including at least one of the repeating units represented by Formulas 2 to 6 below.n n n [Formula 1]n n n n n n n n [Formula 2]n n n n n n n n (3)n n n n n n n n [Formula 4]n n n n n n n n [Chemical Formula 5]n n n n n n n n [Formula 6]n n n n n n n n In Chemical Formulas 1 to 6, each substituent is as defined in the detailed description. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9842852-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020166280-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10345701-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160069497-A |
| priorityDate |
2009-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |