| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6f932d94618d9b875e401457b33e9761 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-38 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-04 |
| filingDate |
2009-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c36ed3a54e54a6942dd29ca50271a4ae
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bac32187258e85c36a05f8fdba4ef5e8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ac64afab3c248ea18fff34e2f56677c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_417b499b089b72cc9f203d1857411e6f |
| publicationDate |
2011-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20110053562-A |
| titleOfInvention |
Etch solution composition for molybdenum |
| abstract |
The present invention is based on the total weight of the composition, H 2 O 2 5-25 wt%; 0.5 to 3 weight percent of the cyclic amine compound; 0.5 to 5% by weight of an additive comprising a pH adjuster; And it relates to an etchant composition for molybdenum comprising a residual amount of water. |
| priorityDate |
2009-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |