abstract |
(A) A polybenzoxazole precursor comprising a repeating unit represented by the following formula (1), a repeating unit represented by the following formula (2), or a combination thereof and having a thermopolymerizable functional group at at least one end portion thereof, (B) The positive photosensitive resin composition containing the photosensitive diazoquinone compound, (C) silane compound, (D) phenol compound which has a crosslinkable functional group, and (E) solvent is provided.n n n [Formula 1]n n n n n n n n [Formula 2]n n n n n n n n In Chemical Formulas 1 and 2,n n n X 1 , X 2 , Y 1 and Y 2 are as defined in the specification. |