| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2bcd2eb4e3fa0acae936f276ec237d0e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6c583f26b230dbfc6009bf3325d514c7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-345
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0605
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0611
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-027 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 |
| filingDate |
2010-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_29b141ce8821f543143bd04c8b62ff7b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e0b5309b856344efd9477f334b9a23ee
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4a9469478d08dd8fc5b4d8adf52b5596 |
| publicationDate |
2011-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20110044146-A |
| titleOfInvention |
Diamond-like carbon film forming member and manufacturing method thereof |
| abstract |
In the DLC film forming member 10, an intermediate layer 14 is disposed between the substrate 12 and the DLC film 16. This intermediate layer 14 is a composite layer containing constituent metal atoms derived from the substrate 12 and diamond-like carbon. For example, such an intermediate layer 14 may be formed by decreasing the absolute value of the negative bias with time while applying a negative bias to the substrate 12 in the plasma layer forming process. Carbon targets or hydrocarbon gases may be used as the carbon source. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150120411-A |
| priorityDate |
2009-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |