http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20110043244-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_65e6cc42bb2719da1d60772d005416f5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_17c6c7da627b7bead7208250127b52c2
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
filingDate 2009-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_21db5443b46ed84d78e75b1db283d02e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f0f3f740d114a32ea1540137fe0b7d66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b1df226cb6952553a55efa6c18688a1a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_04405e17f5bbffc35d8096261ac2ac22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1bfca7ac2a74443231c73be39819b02e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_68879f2581d91cb9432d7ff101287c1e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_68748a4da8908612a79df0e1ee77d2cb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3f8a61ca29602c1d29345ba828c14575
publicationDate 2011-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20110043244-A
titleOfInvention Slurry Composition for Chemical Mechanical Polishing
abstract A solids content of 0.5 to 10% by weight and a complex former comprising at least one abrasive selected from the group consisting of ceria, alumina, silica, titania and zirconia and an organic acid having a carboxyl or amino group and a pH of 6-8 A slurry composition is disclosed.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180062785-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180062786-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170072519-A
priorityDate 2009-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419698070
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419530516
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID498427
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25201556
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1017
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID223
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523260
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419507743
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419557067
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID479307
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458396424
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID27099
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5960
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID612
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419537453
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3998064
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457765275
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID311
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559564
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419550758
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559368
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707785
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9060
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6992103
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412753460
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1118
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID444795
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707770
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62395
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707758
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559357
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23925
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559356
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID938
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6274
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451818717
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410697574
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20467
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3520
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419547110
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419555909
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458397394
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419487220
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9321
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID971
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419506465
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5950
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559377
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426011238
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24261
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474445
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID944
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412584819
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6267
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14797
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7266
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410537804
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20348136
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9989226
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID417109324
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458397365
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419558042
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419490256
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419491185
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419565364
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3301
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474387
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419538597
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID54670067
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID26042
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID370
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID723
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559527
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419539584
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419576385
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID784
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419525060
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID750

Total number of triples: 103.