| abstract |
The present invention relates to a method for producing a low-temperature sintered ceramic sintered body having the same mechanical strength as that of a high-temperature fired alumina sintered body and having a grain less than 0.1 to 10 μm. In general, high purity alumina has a high strength of 200MPa is 1400 ~ 1700 ℃, there is a disadvantage that the strength may be lowered due to grain growth as the firing temperature increases. However, the present invention relates to the fabrication of ceramic sintered body having excellent plasma resistance, which has a high strength and has a grain size of 10 µm or less, which is fired at a low temperature in the range of 1000 to 1400 ° C. without growing grains.n n n Slurry casting, CIP The present invention relates to a method for manufacturing low-temperature sintered ceramics having high plastic density and high strength at low firing temperature by forming by press, hot isostatic press, and doctor blade method and undergoing firing process. |