http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20110032648-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5e06bbf2a93ce8414011cb5ba011faf8 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02359 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02203 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3105 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105 |
| filingDate | 2009-09-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f17c2e4b5eaa682678529907f1814d6a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0f35eb47fda4a2a344e6c4e18bb3a0fc |
| publicationDate | 2011-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20110032648-A |
| titleOfInvention | Improved method for the repair of plasma damaged porous low-k films |
| abstract | PURPOSE: A method of improving a restoration performance of a porous film with dielectric constant which has low damage from plasma is provided to induce a uniform reaction of a whole of a porous low dielectric film by using a supercritical carbon dioxide reactor. CONSTITUTION: In a method of improving a restoration performance of a porous film with dielectric constant which has low damage from plasma, a pure supercritical carbon dioxide is inserted into a reactor(5). A silylating agent is inserted by 1 weight% in comparison to the carbon dioxide comparison through chemicals loop of 6- port valve(3). The silylating agent is loaded into a reactor through the chemicals loop. An ultrasonic wave is applied for 10 second to 10 minutes as a pulse or continuously by the ultrasonic unit(108). If the ultrasonic unit is operated, a silylation reaction occurs in the state applying the ultrasonic wave for a reaction time. Non-reactive silylating agents are exhausted outside of the reactor with the carbon dioxide. |
| priorityDate | 2009-09-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.