http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20110030957-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cf213be03285a0b93967ae2fd2fd351a |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D3-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B57-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D3-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D3-30 |
| filingDate | 2009-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db14cc5fccfc110893ec463030f58053 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f3ed913a3066b7675ac9cf3d8d56e04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_143514d41601b374d38e15bce8fcca1c |
| publicationDate | 2011-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20110030957-A |
| titleOfInvention | Polishing pads containing core-shell type particles |
| abstract | The present invention relates to a polishing pad containing particles of core-shell type, and more particularly to a polishing pad comprising a matrix containing particles of core-shell type, said shell comprising: i) a carboxylic acid compound; Ii) olefinically unsaturated compounds; And iii) methacrylic esters of ethoxylated patty alcohols, isotridecyl methacrylate, steryl methacrylate, isodecyl methacrylate, ethylhexyl methacrylate, ethyltriglycol methacrylate, methoxypolyethylene glycol methacryl And a copolymer resin prepared from at least one compound selected from butyl diglycol methacrylate.n n n The polishing pad of the present invention further provides flexibility to the shell constituting the core-shell type particles, and does not form a hollow, thereby enabling high hardness and high density, thereby maximizing polishing efficiency and wafer flatness. In particular, it exhibits a uniform degree of polishing over time. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190054600-A |
| priorityDate | 2009-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 101.