http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20110029112-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c53e1b6142a636b06b7da3ca5788e3d0 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01K3-04 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2009-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e4cc5a88097198eb8ab4a67b5fa2249 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a284a25a35576d88d4e08714e04043fd |
| publicationDate | 2011-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20110029112-A |
| titleOfInvention | Systems to monitor consumable parts and how to predict their maintenance and monitor performance life |
| abstract | The method 20 of determining maintenance intervals for equipment and / or consumable parts comprising consumable parts obtains a plurality of temperature measurements of the consumable parts (22), each measurement in an aggregation device. Receiving (24), relating each measurement to one of the plurality of temperature subranges (26), accumulating the amount of time that the temperature measurement is associated with each subrange during each subrange (28), The weighted function sums the accumulated time for each subrange to determine the total time (30), and generates a signal to facilitate a maintenance event when the total time exceeds or equals the execution time set point (32). Alternatively or additionally to the above, the method also relates the subranges of the two consecutive measurements (34), indexes the breakpoint into the register if the subranges involved are different (36), and the value of the breakpoint register stops. Generate a signal to trigger a maintenance event when the point setpoint is over or equal to. Also disclosed is a system for collecting, storing, and displaying performance data of a resistive heating element in a semiconductor processing apparatus. |
| priorityDate | 2008-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24261 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707758 |
Total number of triples: 15.